Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ivar Schram0
Johan Frederik Dijksman0
Sander Frederik Wuister0
Yvonne Wendela Kruijt-Stegeman0
Date of Patent
January 4, 2011
0Patent Application Number
113929500
Date Filed
March 30, 2006
0Patent Primary Examiner
Patent abstract
A method of making a substantial replica of a first imprint template which bears a first pattern is disclosed. The method includes filling recesses of the first pattern with a first material, removing the first material from the first imprint template to form a second imprint template which bears a second pattern, the second pattern being the substantial inverse of the first pattern, filling recesses of the second pattern with a photo-curable medium, curing the photo-curable medium by illuminating it with radiation, and removing the cured medium from the second imprint template to form a third imprint template which bears a pattern that is a substantial replica of the first pattern.
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