US Patent 7864006 MEMS plate switch and method of manufacture
Patent 7864006 was granted and assigned to IMT (Innovative Micro Technology) on January, 2011 by the United States Patent and Trademark Office.
Is a
Date Filed
February 8, 2008
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Date of Patent
January 4, 2011
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Patent Application Number
12068586
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Patent Inventor Names
Paulo Silveira da Motta
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Alok Paranjpye
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John S. Foster
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Kimon Rybnicek
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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