US Patent 7864325 Interferometer, demodulator, and splitting element
Patent 7864325 was granted and assigned to Yokogawa Electric on January, 2011 by the United States Patent and Trademark Office.
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An interferometer of the invention includes: a first splitting element which includes a first transparent medium and a first splitting film formed on the first transparent medium, and which splits incident light into a first split beam and a second split beam, the first split beam being the incident light reflected by the first splitting element and the second split beam being the incident light transmitted through the first splitting element; and a second splitting element which includes a second transparent medium and a second splitting film formed on the second transparent medium, and which causes interference between the first split beam and the second split beam passed through different optical paths, the second splitting element being positioned such that a positional relationship between the second transparent medium and the second splitting film with respect to a direction of incidence on the second splitting element of the first split beam is opposite to a positional relationship between the first transparent medium and the first splitting film with respect to a direction of incidence of the incident light on the first splitting element.
US Patent 07864325 Interferometer, demodulator, and splitting element US Patent 7864325 Interferometer, demodulator, and splitting element
US Patent 07864325 Interferometer, demodulator, and splitting element
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