Patent attributes
In an aspect of the coating method according to the present invention, the lower limit decompression degree PS1 at which a seam trouble occurs is obtained from the formula of the viscocapillary model. According to the aspect of the present invention, coating is performed by setting the Pb so as to satisfy PS1<P0−Pb≦PS1+0.2, and therefore, stepped unevenness can be effectively suppressed so that a seam trouble does not occur. It goes without saying that the aspect of the present invention can be applied to high viscosity/thick film coating, but it is effective especially in the case where a coating solution with low viscosity (for example, 0.005 Pa·s or lower) is coated to be an ultra-thin film (for example, 10 μm or less in the wet film thickness) where stepped unevenness easily occurs.
