Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 11, 2011
Patent Application Number
12618542
Date Filed
November 13, 2009
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A method includes forming a switching device which includes a vertical channel spaced apart from a semiconductor substrate, and forming a storage device which is positioned on opposed sides of the switching device. The storage device includes a cylindrically shaped storage node, a plate electrode coupled to the storage node, and a dielectric film which is formed between the storage node and plate electrode, the storage nodes being electrically connected to the switching device.
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