Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
William Cummings0
Brian Gally0
Date of Patent
January 11, 2011
0Patent Application Number
118416330
Date Filed
August 20, 2007
0Patent Primary Examiner
Patent abstract
Process control monitors are disclosed that are produced using at least some of the same process steps used to manufacture a MEMS device. Analysis of the process control monitors can provide information regarding properties of the MEMS device and components or sub-components in the device. This information can be used to identify errors in processing or to optimize the MEMS device. In some embodiments, analysis of the process control monitors may utilize optical measurements.
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