US Patent 7869122 Catadioptric projection objective
Patent 7869122 was granted and assigned to Carl Zeiss SMT on January, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 9, 2008
Date of Patent
January 11, 2011
Patent Application Number
12100233
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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