Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tasuku Matsumiya0
Takako Hirosaki0
Date of Patent
January 18, 2011
Patent Application Number
12090826
Date Filed
November 9, 2006
Patent Primary Examiner
Patent abstract
A positive resist composition of the present invention includes a resin component (A) which displays increased alkali solubility under the action of an acid, and an acid generator component (B) which generates an acid upon exposure, wherein the resin component (A) includes a structural unit (a0) containing a carboxyl group, and at least one structural unit (a1) selected from the group consisting of a structural unit represented by a general formula (a1-2) and a structural unit represented by a general formula (a1-4) shown below:
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