Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 18, 2011
Patent Application Number
10319403
Date Filed
December 12, 2002
Patent Citations Received
Patent Primary Examiner
Patent abstract
In certain embodiments, a MEMS actuator is provided comprising a frame and a movable structure coupled to the frame. A vertical comb drive is provided between the frame and the movable structure to actuate the movable structure.
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