Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
January 25, 2011
Patent Application Number
12393471
Date Filed
February 26, 2009
Patent Primary Examiner
Patent abstract
A piezoelectric device includes a substrate composed of a (110) single crystal silicon, a driver IC formed in the substrate, and a piezoelectric device that is formed above the substrate and is driven by the driver IC, wherein the driver IC has an analog switch including a transistor, the transistor having a channel direction in <001> orientation of the substrate.
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