Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hideomi Suzawa0
Shunpei Yamazaki0
Yoshihiro Kusuyama0
Date of Patent
January 25, 2011
Patent Application Number
12766172
Date Filed
April 23, 2010
Patent Citations Received
Patent Primary Examiner
Patent abstract
The present invention has an object to provide an active-matrix liquid crystal display device that realizes the improvement in productivity as well as in yield. In the present invention, a laminate film comprising the conductive film comprising metallic material and the second amorphous semiconductor film containing an impurity element of one conductivity type and the amorphous semiconductor film is selectively etched with the same etching gas to form a side edge of the first amorphous semiconductor film 1001 into a taper shape. Thereby, a coverage problem of a pixel electrode 1003 can be solved and an inverse stagger type can be completed with three photomask.
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