Patent 7876023 was granted and assigned to NGK Insulators on January, 2011 by the United States Patent and Trademark Office.
Disclosed is a piezoelectric/electrostrictive membrane sensor wherein the main component of terminal electrodes is contained in the vicinity of the surface of a piezoelectric/electrostrictive body. The membrane sensor is hardly electrostatically charged and thus prevented from electrostatic discharge damage and/or the attraction of dust, dirt or the like.