Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ashok Kulkarni0
Brian Duffy0
Date of Patent
January 25, 2011
0Patent Application Number
119601570
Date Filed
December 19, 2007
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Systems and methods for creating inspection recipes are provided. One computer-implemented method for creating an inspection recipe includes acquiring a first design and one or more characteristics of output of an inspection system for a wafer on which the first design is printed using a manufacturing process. The method also includes creating an inspection recipe for a second design using the first design and the one or more characteristics of the output acquired for the wafer on which the first design is printed. The first and second designs are different. The inspection recipe will be used for inspecting wafers after the second design is printed on the wafers using the manufacturing process.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.