Patent attributes
The invention is an indenter tip that is modified to permit both compression testing and tensile testing on samples having dimensions smaller than approximately 1 μm. The modified indenter tip has both a surface that can be used to apply compressive forces, and tines that can be used to engage a free end of a specimen to be tested in tension. The apparatus used to perform the tests includes elements of a scanning electron microscope that permit visualization of the specimen to be tested and the modified indenter tip, so as to permit appropriate alignment and engagement of the same. The apparatus also includes elements of a microindenter that provide mechanical manipulation of the relative position and orientation of the modified indenter tip and of the specimen to be tested, as well as the necessary controls and instrumentation to perform the test and to collect, record and manipulate data.
