Patent attributes
A film-forming apparatus includes a mixing section which mixes material particles and core particles having a large particle size than that of the material particles; a separating section which separates the material particles and the core particles; an aerosol-generator which generates aerosol by dispersing the separated material particles in a carrier gas; and a nozzle which ejects the aerosol containing the material particles. The core particles having the large particle size can be easily controlled in terms of transport amount of the core particles, as compared to the material particles which are fine particles used for the film formation. Further, since the core particles hardly cause clog-up in the system, the concentration of aerosol can be maintained stably by appropriately controlling the transport amount of the core particles.
