US Patent 7879511 Sequential lateral solidification mask

Patent 7879511 was granted and assigned to AU Optronics on February, 2011 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

AU Optronics

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7879511

Date of Patent

February 1, 2011

Patent Application Number

11368634

Date Filed

March 7, 2006

Patent Primary Examiner

‌

N. Drew Richards

Patent abstract

A mask used in a sequential lateral solidification process to fabricate a multi-boundary polysilicon. The mask comprises a first portion, a second portion and a third portion. The first and the third portions are translucent to light, and the second portion is opaque. These three portions have the same shape but different sizes. The first portion surrounds the second portion, and the third portion is parallel to both the first and the second portions.

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