US Patent 7879526 Hardmask compositions for resist underlayer films
Patent 7879526 was granted and assigned to Cheil Industries on February, 2011 by the United States Patent and Trademark Office.
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Patent abstract
Provided herein are hardmask compositions for resist underlayer films, wherein according to some embodiments of the invention, hardmask compositions include a polymer prepared by the reaction of a compound of Formula 1
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US Patent 07879526 Hardmask compositions for resist underlayer films US Patent 7879526 Hardmask compositions for resist underlayer films
Infobox
Patent Number
0787952600
Patent Number
787952600
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
078795260
Date of Patent
February 1, 2011
0Patent Application Number
115080740
Date Filed
August 22, 2006
0Official Website
Patent Primary Examiner
Edits on 27 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
078795260
Date of Patent
February 1, 2011
0Patent Application Number
115080740
Date Filed
August 22, 2006
0Official Website
Patent Primary Examiner
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US Patent 07879526 Hardmask compositions for resist underlayer films
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07879526
Date of patent
February 1, 2011
Patent application number
11508074
Date Filed
August 22, 2006
Patent primary examiner
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