Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Bridgette Maria Budhlall0
Peng Zhang0
Leslie Cox Barber0
Gene Everad Parris0
Date of Patent
February 1, 2011
0Patent Application Number
110301320
Date Filed
January 7, 2005
0Patent Primary Examiner
Patent abstract
Suitable additives that may be added into immersion fluids, immersion fluids comprising at least one carrier medium selected from an aqueous fluid, a non-aqueous fluid, and mixtures thereof, and immersions fluids comprising at least one carrier medium and at least one additive useful for performing immersion lithography at an operating wavelength ranging from 140 nm to 365 nm are disclosed herein.
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