US Patent 7882701 Microfabricated mechanical frequency multiplier

A high-bandwidth MEMS actuation system includes actuator pairs coupled in parallel to a stage, each actuator energizable in a drive direction against a bias to an energized position, and movable upon deenergization, to the rest position to define an actuation cycle. The actuators are asymmetric, with an energization frequency greater than a bias frequency, and are opposably coupled to one another. A pulse generator alternately transmits pulses to the actuators, at an alternation frequency greater than the bias frequency. The pulse generator transmits the energization pulses to each of the actuator pairs sequentially at a sequence frequency greater than the cycle frequency. The actuators are each movable from energized to rest positions faster than the bias frequency, and the actuator pairs are sequentially energizable faster than the cycle frequency, wherein the stage is movable in one degree of freedom at a bandwidth of at least four times the cycle frequency.