Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 8, 2011
Patent Application Number
12057478
Date Filed
March 28, 2008
Patent Citations Received
Patent Primary Examiner
Patent abstract
Linear or branched functionalized polycarbosilanes having an absorbance less than 3.0 μm−1 at 193 nm and a relatively high refractive index are provided. The functionalized polycarbosilanes contain at least one pendant group that is acid labile or aqueous base soluble. Also disclosed are photoresists formulations containing the functionalized polycarbosilanes that are suitable for use in lithography, e.g., immersion lithography.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
