A nano-scale compliant mechanism includes a coupler and a plurality of nanotubes disposed for nano-scale motion relative to a grounded component. The nanotubes are fastened at one end to the coupler and at the other end to ground, to guide motion of the coupler relative to the ground. Particular embodiments include a plurality of parallel carbon nanotubes. An exemplary embodiment exhibits first and second regions of mechanical behavior; a first region governed by bulk elastic deformation of the nanotubes and a second region governed by compliant, hinge-like bending of the buckled nanotubes.