US Patent 7885309 Laser system
Patent 7885309 was granted and assigned to Cymer on February, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 13, 2007
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Date of Patent
February 8, 2011
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Patent Application Number
11787180
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Patent Inventor Names
William N. Partlo
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Alexander I. Ershov
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Daniel J. W. Brown
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Igor V. Fomenkov
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Ivan Lalovic
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Richard L. Sandstrom
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Robert A. Bergstedt
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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