Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hak Joon Kim0
Jun Hyung Park0
Date of Patent
February 15, 2011
0Patent Application Number
119362240
Date Filed
November 7, 2007
0Patent Primary Examiner
Patent abstract
A method and apparatus for manufacturing a semiconductor device is disclosed. In particular, the application discloses a method that performs a lithography process using a material capable of increasing a depth of focus so as to prevent efficiency of the lithography process from being degraded due to high integration of a semiconductor device, and a pressure-type bake oven as an apparatus for forming a high refractive material on a semiconductor substrate, having advantages of reducing manufacturing costs of a semiconductor manufacturing process and increasing efficiency of the lithography process.
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