Patent attributes
The present invention relates to a method of manufacturing a ferroelectric thin film device, and, more particularly, to a method of manufacturing a ferroelectric thin film device having high crystallinity, good surface roughness and high deposition efficiency through on-axis type sputtering, and to a ferroelectric thin film device manufactured using the method. The method of manufacturing a ferroelectric thin film device includes: depositing an SrRuO3 (SRO) thin film on an SrTiO3 (STO) substrate; and depositing a BiFeO3 (BFO) thin film on the deposited SRO thin film, wherein each of the thin films is deposited in a state in which the STO substrate is isolated from the ground. The method of manufacturing a ferroelectric thin film device is advantageous in that a ferroelectric thin film has a uniform surface, thus greatly decreasing the amount of leakage current and increasing remnant polarization.
