Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yoshihiro Minami0
Takeo Kubota0
Yukiteru Matsui0
Yoshikuni Tateyama0
Hiroyuki Kanaya0
Date of Patent
February 15, 2011
0Patent Application Number
125492610
Date Filed
August 27, 2009
0Patent Primary Examiner
Patent abstract
A first electrode film, a ferroelectric film, and a second electrode film are accumulated above a semiconductor in this order, a hard mask is accumulated above the second electrode, scrub cleaning is performed on the surface of the hard mask with an surfactant, the hard mask on which the scrub cleaning is performed has been patterned according to a planar shape of a ferroelectric capacitor, and etching is performed by using as a hard mask the hard mask that has been patterned.
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