US Patent 7888249 Use of chained implants in solar cell
Patent 7888249 was granted and assigned to Varian Semiconductor Equipment Associates on February, 2011 by the United States Patent and Trademark Office.
All edits
The manufacture of solar cells is simplified and cost reduced through by performing successive ion implants, without an intervening thermal cycle. In addition to reducing process time, the use of chained ion implantations may also improve the performance of the solar cell. In another embodiment, two different species are successively implanted without breaking vacuum. In another embodiment, the substrate is implanted, then flipped such that it can be and implanted on both sides before being annealed. In yet another embodiment, one or more different masks are applied and successive implantations are performed without breaking the vacuum condition, thereby reducing the process time.
US Patent 07888249 Use of chained implants in solar cell US Patent 7888249 Use of chained implants in solar cell
US Patent 07888249 Use of chained implants in solar cell
Find more entities like US Patent 7888249 Use of chained implants in solar cell
