Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hai-Lin Sun0
Shou-Shan Fan0
Qun-Qing Li0
Kai-Li Jiang0
Date of Patent
February 15, 2011
Patent Application Number
12291301
Date Filed
November 6, 2008
Patent Primary Examiner
Patent abstract
A method for making silicon nano-structure, the method includes the following steps. Firstly, providing a growing substrate and a growing device, the growing device comprising a heating apparatus and a reacting room. Secondly, placing the growing substrate and a quantity of catalyst separately into the reacting room. Thirdly, introducing a silicon-containing gas and hydrogen gas into the reacting room. Lastly, heating the reacting room to a temperature of 500˜1100° C.
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