Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 15, 2011
Patent Application Number
12585486
Date Filed
September 16, 2009
Patent Primary Examiner
Patent abstract
The invention provides a cleaning liquid for semiconductor devices which is capable of removing deposits on a surface of an object to be cleaned including a photoresist, an antireflective film, an etching residue and an ashing residue at a low temperature in a short period of time with reduced environmental burdens and without causing corrosion of an interlayer dielectric film, a metal, a metal nitride, and an alloy in the object to be cleaned. The cleaning liquid for semiconductor devices according to the invention contains a reducing agent and a surfactant and has a pH of 10 to 14.
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