US Patent 7892719 Photonic crystal EUV photoresists
Patent 7892719 was granted and assigned to Intel on February, 2011 by the United States Patent and Trademark Office.
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Patent abstract
Embodiments of the present invention provide EUV (extreme ultraviolet) photoresists comprising photonic crystals, as well as other components. Photonic crystals in general provide the ability not only to block light transmission, but also to create resonant pockets in which light can propagate. The photonic crystals are based on bio-related polymers that are capable of self-assembly into crystalline form.
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US Patent 07892719 Photonic crystal EUV photoresists US Patent 7892719 Photonic crystal EUV photoresists
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Patent Number
0789271900
Patent Number
789271900
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
078927190
Date of Patent
February 22, 2011
0Patent Application Number
115926230
Date Filed
November 3, 2006
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
078927190
Date of Patent
February 22, 2011
0Patent Application Number
115926230
Date Filed
November 3, 2006
0Official Website
Patent Primary Examiner
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US Patent 07892719 Photonic crystal EUV photoresists
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07892719
Date of patent
February 22, 2011
Patent application number
11592623
Date Filed
November 3, 2006
Patent primary examiner
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