Patent 7893796 was granted and assigned to Sony on February, 2011 by the United States Patent and Trademark Office.
A high frequency device including an electrostatic type vibrator, a pad, and a circuit. The electrostatic type vibrator is operable via a DC bias voltage. The pad is configured to supply the DC bias voltage. The circuit is positioned electrically between the pad and the vibrator. The circuit is configured to stabilize the DC bias voltage. The circuit and the high frequency signal device are on a common substrate.