Patent attributes
A system is configured to compensate for guide flatness errors and/or shifting of a support. The system can include one or more support devices, fluid or magnetic bearings to guide the one or more support devices along a guide, and a compensation system. The compensation system is coupled to respective ones of the one or more support devices adjacent to each of the fluid or magnetic bearings. The compensation system is configured to generate a rotational motion that compensates for tilting in the support devices compensate for any non-straight areas of the guide or shifting (e.g., thermal shifting) of the support devices, which is done through moving of the support devices with respect to the guides during movement of the support devices along the guide.
