Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 1, 2011
Patent Application Number
11951660
Date Filed
December 6, 2007
Patent Citations Received
Patent Primary Examiner
Patent abstract
The invention generally relates to atomic resolution imaging, and, more particularly, to systems and methods for calibrating an atomic resolution measurement tool. A sample holder for holding test samples used in measuring linearity of an atomic force microscope is provided. The holder includes a body having a top surface, and a plurality of inclined regions formed in the body and spaced apart along the top surface. Each of the inclined regions is structured and arranged to hold a test sample used to measure linearity of an atomic force microscope at one of a plurality of predefined angles.
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