Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Royann L. Stewart-Davis0
David E. Lococq0
George A. Neuman0
Date of Patent
March 1, 2011
0Patent Application Number
090576770
Date Filed
April 9, 1998
0Patent Primary Examiner
Patent abstract
Silicon compounds useful as coating reactants for the chemical vapor deposition of silicon oxide are disclosed, along with compounds useful as accelerants to increase the deposition rate of silicon oxide. The silicon-containing precursor comprises the structural formula
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
