US Patent 7897945 Hydrogen ion implanter using a broad beam source

Patent 7897945 was granted and assigned to Twin Creeks Technologies, Inc on March, 2011 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

Twin Creeks Technologies, Inc

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7897945

Date of Patent

March 1, 2011

Patent Application Number

12237963

Date Filed

September 25, 2008

Patent Primary Examiner

‌

Kiet T Nguyen

Patent abstract

Ion implanters incorporating multibeam ion sources are used to meet process dose and energy demands associated with fabricating a thin lamina for use in photovoltaic devices. The thin lamina are formed by ion implantation followed by cleaving.

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