US Patent 7898561 MEMS mirror system for laser printing applications
Patent 7898561 was granted and assigned to Miradia on March, 2011 by the United States Patent and Trademark Office.
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Patent abstract
A MEMS mirror for a laser printing application includes providing a CMOS substrate including a pair of electrodes, and providing a reflecting mirror moveable over the substrate and the electrodes. Voltages applied to the electrodes create an electrostatic force causing an end of the mirror to be attracted to the substrate. A precise position of the mirror can be detected and controlled by sensing a change in capacitance between the mirror ends and the underlying electrodes.
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Patent Inventor Names
Dongmin Chen0
William Spencer Worley, III0
Xiao Yang0
Ye Wang0
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US Patent 07898561 MEMS mirror system for laser printing applications US Patent 7898561 MEMS mirror system for laser printing applications
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Patent Number
078985610
Patent Number
78985610
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Official Website
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
078985610
Date of Patent
March 1, 2011
0Patent Application Number
120198220
Date Filed
January 25, 2008
0Official Website
Patent Primary Examiner
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US Patent 07898561 MEMS mirror system for laser printing applications
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07898561
Date of patent
March 1, 2011
Patent application number
12019822
Date Filed
January 25, 2008
Patent primary examiner
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