Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jacques Gollier0
Correy Robert Ustanik0
David Berg0
Douglas S Goodman0
Date of Patent
March 1, 2011
0Patent Application Number
120723850
Date Filed
February 26, 2008
0Patent Primary Examiner
Patent abstract
A distortion measurement and inspection system is presented. In one embodiment, a vision system is implemented. The vision system performs dual focal plane imaging where simultaneous imaging of two focal planes is simultaneously performed on a sample substrate and a reference substrate to determine distortion. In addition, a highly reflective background is implemented to provide for more resolution during distortion measurement.
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