US Patent 7900478 Method of manufacturing an ultrathin optical element
Patent 7900478 was granted and assigned to ASML Holding on March, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 30, 2007
0
Date of Patent
March 8, 2011
0
Patent Application Number
11976997
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Patent Inventor Names
Nicholas A. DeLuca
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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