Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Raymond Gerardus Marius Beeren0
Kornelis Tijmen Hoekerd0
Marco Koert Stavenga0
Peter Franciscus Wanten0
Anthonius Martinus Cornelis Petrus De Jong0
Bauke Jansen0
Hans Jansen0
Johannes Wilhelmus Jacobus Leonardus Cuijpers0
Date of Patent
March 8, 2011
Patent Application Number
11819959
Date Filed
June 29, 2007
Patent Primary Examiner
Patent abstract
A cleaning tool to clean a surface of a component of a lithographic apparatus is disclosed. The cleaning tool includes a sonic transducer, a liquid supply device configured to provide liquid to a reservoir between the surface to be cleaned and the sonic transducer, and a liquid outlet configured to remove liquid provided by the liquid supply device, the cleaning tool constructed and arranged such that, in use, liquid flows into the outlet under the influence of gravity.
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