US Patent 7901387 Micro needles and method of manufacture thereof

A hollow out-of-wafer-plane micro-needle protruding from a support member, the micro-needle includes a body portion having a longitudinal central axis, an inner lumen within the body portion and extending through the support member and into the protruding micro-needle, a closed pointed tip portion closing off the inner lumen in the tip region, the central axis extending through the tip portion, and at least one side opening in the body portion having an axis that intersects the central axis, the at least one side opening communicating with the inner lumen.