US Patent 7901514 Substrate cleaning method and developing apparatus
Is a
Date Filed
July 15, 2009
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Date of Patent
March 8, 2011
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Patent Application Number
12503412
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Patent Inventor Names
Kentaro Yamamura
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Kousuke Yoshihara
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Fumiko Iwao
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Hirofumi Takeguchi
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Junji Nakamura
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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