US Patent 7901734 Method of manufacturing nozzle plate

The method manufactures a nozzle plate having nozzle orifices for ejecting liquid droplets. The method comprises: a hole forming step of forming holes in a nozzle forming substrate, each of the holes passing through the nozzle forming substrate and having openings on a surface of a liquid droplet ejection side and a surface of a side opposite thereto of the nozzle forming substrate, the holes having a larger diameter than the nozzle orifices; a liquid-philic film forming step of forming a liquid-philic film on inner walls of the holes, the liquid-philic film blocking at least a portion of each of the holes; a liquid-repelling film forming step of forming a liquid-repelling film on the surface of the liquid droplet ejection side of the nozzle forming substrate, after performing the liquid-philic film forming step; and a nozzle orifice forming step of forming the nozzle orifices in the holes that are filled with the liquid-repelling film, after performing the liquid-repelling film forming step.