Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kie Y. Ahn0
Leonard Forbes0
Arup Bhattacharyya0
Date of Patent
March 8, 2011
0Patent Application Number
124701210
Date Filed
May 21, 2009
0Patent Primary Examiner
Patent abstract
Electronic apparatus and methods of forming the electronic apparatus include a tantalum lanthanide oxynitride film on a substrate for use in a variety of electronic systems. The tantalum lanthanide oxynitride film may be structured as one or more monolayers. Metal electrodes may be disposed on a dielectric containing a tantalum lanthanide oxynitride film.
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