Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 8, 2011
Patent Application Number
11631463
Date Filed
July 7, 2005
Patent Primary Examiner
Patent abstract
A spectral purity range (E95) of a laser beam output from an amplifying laser device (300) is measured by spectral purity range measuring means. To have the measured spectral purity range (E95) within an allowable range E950±dE95 of a target spectral purity range (E950), discharge timing from a time when discharge is started by an oscillating laser device (100) to a time when discharge is started by the amplifying laser device (300) is controlled, and the spectral purity range (E95) is controlled to be stabilized.
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