US Patent 7905139 Mass flow controller with improved dynamic
Patent 7905139 was granted and assigned to Brooks Instrument on March, 2011 by the United States Patent and Trademark Office.
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Patent abstract
A system and method of compensating for pressure variations in a flow controller entails the use of the compressibility of the gas being controlled to provide a more accurate measurement of the flow.
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Patent Inventor Names
John Michael Lull0
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US Patent 07905139 Mass flow controller with improved dynamic US Patent 7905139 Mass flow controller with improved dynamic
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Patent Number
07905139
Patent Number
7905139
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US Patent 07905139 Mass flow controller with improved dynamic
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Is a
Current assignee
Patent jurisdiction
Patent number
07905139
Date of patent
March 15, 2011
Patent application number
12197888
Date Filed
August 25, 2008
Patent primary examiner
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