US Patent 7906427 Dimension profiling of SiC devices
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Patent abstract
There is provided a method for dimension profiling of a semiconductor device. The method involves incorporating a feature comprising a detectable element into the device, and thereafter detecting the detectable element to determine a dimension of the feature. This information can be used for the determination of a dimension of buried channels, and also for end-point detection of CMP processes.
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Patent Inventor Names
Jody Alan Fronheiser0
Kevin Sean Matocha0
Peter Micah Sandvik0
Vinayak Tilak0
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US Patent 07906427 Dimension profiling of SiC devices US Patent 7906427 Dimension profiling of SiC devices
Infobox
Patent Number
079064270
Patent Number
79064270
Edits on 27 Sep, 2022
Golden AI
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Patent Jurisdiction
Patent Number
079064270
Date of Patent
March 15, 2011
0Patent Application Number
122513410
Date Filed
October 14, 2008
0Official Website
Patent Primary Examiner
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US Patent 07906427 Dimension profiling of SiC devices
Infobox
Is a
Patent jurisdiction
Patent number
07906427
Date of patent
March 15, 2011
Patent application number
12251341
Date Filed
October 14, 2008
Patent primary examiner
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