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US Patent 7909228 Ribbon bonding tool and process

Patent 7909228 was granted and assigned to Orthodyne Electronics on March, 2011 by the United States Patent and Trademark Office.

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Current Assignee
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Orthodyne Electronics
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
79092280
Patent Inventor Names
Christoph Benno Luechinger0
Mark Arnold Delsman0
Date of Patent
March 22, 2011
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Patent Application Number
121032260
Date Filed
April 15, 2008
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Patent Citations Received
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US Patent 11929265 Semiconductor manufacturing apparatus and method of manufacturing semiconductor device
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Patent Primary Examiner
Roy King
Roy King
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Patent abstract

An ultrasonic bond is formed using a bond tool foot having a waffle shape of thin protrusions and gaps between the protrusions. The tool is brought in contact with the ribbon to a depth to create depressions in a ribbon approximately 150 μm or less from the underlying bonding surface. The tool is then brought down further into the ribbon to contact the portions of the ribbon between the depressions, such as an additional 25 to 50 μm. The result is lightly bonded regions underneath the groove portions and highly bonded regions underneath the protrusions and around the perimeter of the bond. In another embodiment, an ultrasonic bond is formed along a partial width of a ribbon.

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