Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Weimin Li0
Date of Patent
March 22, 2011
Patent Application Number
11496093
Date Filed
July 31, 2006
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for growing films on substrates using sequentially pulsed precursors and reactants, system and devices for performing the method, semiconductor devices so produced, and machine readable media containing the method.
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