Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kazuhiko Endo0
Tatsuya Usami0
Noboru Morita0
Koichi Ohto0
Date of Patent
March 22, 2011
0Patent Application Number
120981900
Date Filed
April 4, 2008
0Patent Primary Examiner
Patent abstract
An object of the present invention is to provide a semiconductor device which comprises a barrier film having a high etching selection ratio of the interlayer insulating film thereto, a good preventive function against the Cu diffusion, a low dielectric constant and excellent adhesiveness to the Cu interconnection and a manufacturing method thereof.
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