Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 22, 2011
Patent Application Number
11988915
Date Filed
July 11, 2006
Patent Primary Examiner
Patent abstract
A processing table 3 holding a workpiece 2 is accommodated in a chamber 4 with a gas-tight condition kept, and a liquid column W is jetted to an upper surface of this chamber 4, and a processing head 9 that guides laser beam L to the liquid column W is secured to the upper surface of this chamber 4.
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