Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Clarence Chui0
Date of Patent
March 22, 2011
Patent Application Number
12240931
Date Filed
September 29, 2008
Patent Primary Examiner
Patent abstract
A MEMS device is electrically actuated with a voltage placed across a first electrode and a moveable material. The device may be maintained in an actuated state by latch electrodes that are separate from the first electrode.
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